Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces
نویسندگان
چکیده
منابع مشابه
Growth of Large-Area Single- and Bi-Layer Graphene by Controlled Carbon Precipitation on Polycrystalline Ni Surfaces
We report graphene films composed mostly of one or two layers of graphene grown by controlled carbon precipitation on the surface of polycrystalline Ni thin films during atmospheric chemical vapor deposition (CVD). Controlling both the methane concentration during CVD and the substrate cooling rate during graphene growth can significantly improve the thickness uniformity. As a result, oneor two...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2020
ISSN: 0924-4247
DOI: 10.1016/j.sna.2020.111837